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CVD Materials
TEOS (Tetraethoxysilane) : Si(C
2
H
5
O)
4
TMB (Trimethyl Borate) : B(CH
3
O)
3
TEB (Triethyl Borate) : B(C
2
H
5
O)
3
TMPI (Trimethyl Phosphite) : P(CH
3
O)
3
TMOP (Trimethyl Phosphate) : PO(CH
3
O)
3
TEPO (Triethyl Phosphate) : PO(C
2
H
5
O)
3
TEOF (Triethoxy Fluoro Silane) : Si(C
2
H
5
O)
3
F
TiCl
4
(Titanium Tetrachloride)
TDMAT (Tetrakis Dimethylamino Titanium) : Ti[N(CH
3
)
2
]
4
TDEAT (Tetrakis Diethylamino Titanium) : Ti[N(C
2
H
5
)
2
]
4
BBr
3
(Boron Tribromide)
PET (Pentaethoxy Tantalum) : Ta(OC
2
H
5
)
5
POCl
3
(Phosphorus Oxychloride)
DCS (Dichlorosilane) : SiH
2
Cl
2
TMCTS (2.4.6.8 - Tetramethyl Cyclo Tetra Siloxane) : (SiHCH
3
O)
4
TMS (Tetramethyl Silane) : Si(CH
3
)
4
DMDMOS (Dimethyl Dimethoxy Silane) : Si(OCH
3
)
2
(CH
3
)
2
Others
Doping Materials
POCl
3
(Phosphorus Oxychloride)
BBr
3
(Boron Tribromide)
Others
Oxidation and Cleaning Materials
1,1,1 - TCA (1,1,1 - Trichloroethane) : C
2
H
3
Cl
3
DCE (Dichloroethylene) : C
2
H
2
Cl
2
Others
ALD Materials
DMAI (Dimethyl Aluminum Isopropoxide) : Al(CH
3
)
2
(OPri)
TMA (Trimethyl Aluminum) : Al(CH
3
)
3
Hafnium T-Butoxide : Hf(OBu)
4
TDMAHf (Tetrakis Dimethyl Amino Hafnium) : Hf[N(CH
3
)
2
]
4